dc.contributor.author | Ragnarsson, Lars-Ake | |
dc.contributor.author | Garcia Bardon, Marie | |
dc.contributor.author | Wuytens, Pieter | |
dc.contributor.author | Mirabelli, Gioele | |
dc.contributor.author | Jang, Doyoung | |
dc.contributor.author | Willems, Geert | |
dc.contributor.author | Mallik, Arindam | |
dc.contributor.author | Spessot, Alessio | |
dc.contributor.author | Ryckaert, Julien | |
dc.contributor.author | Parvais, Bertrand | |
dc.date.accessioned | 2022-11-15T10:19:00Z | |
dc.date.available | 2022-09-22T02:50:29Z | |
dc.date.available | 2022-11-15T10:19:00Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | na | |
dc.identifier.other | WOS:000852566800025 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40476.2 | |
dc.source | WOS | |
dc.title | The Environmental Impact of CMOS Logic Technologies | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ragnarsson, Lars-Ake | |
dc.contributor.imecauthor | Garcia Bardon, Marie | |
dc.contributor.imecauthor | Wuytens, Pieter | |
dc.contributor.imecauthor | Mirabelli, Gioele | |
dc.contributor.imecauthor | Jang, Doyoung | |
dc.contributor.imecauthor | Willems, Geert | |
dc.contributor.imecauthor | Mallik, Arindam | |
dc.contributor.imecauthor | Spessot, Alessio | |
dc.contributor.imecauthor | Ryckaert, Julien | |
dc.contributor.imecauthor | Parvais, Bertrand | |
dc.contributor.orcidimec | Ragnarsson, Lars-Ake::0000-0003-1057-8140 | |
dc.contributor.orcidimec | Garcia Bardon, Marie::0000-0001-5772-5406 | |
dc.contributor.orcidimec | Wuytens, Pieter::0000-0002-0793-256X | |
dc.contributor.orcidimec | Mirabelli, Gioele::0000-0001-7060-4836 | |
dc.contributor.orcidimec | Willems, Geert::0000-0002-9137-618X | |
dc.contributor.orcidimec | Mallik, Arindam::0000-0002-0742-9366 | |
dc.contributor.orcidimec | Parvais, Bertrand::0000-0003-0769-7069 | |
dc.identifier.doi | 10.1109/EDTM53872.2022.9798208 | |
dc.identifier.eisbn | 978-1-6654-2178-2 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 82 | |
dc.source.endpage | 84 | |
dc.source.conference | 6th IEEE Electron Devices Technology and Manufacturing Conference (EDTM) | |
dc.source.conferencedate | MAR 06-09, 2022 | |
dc.source.conferencelocation | Oita, Japan | |
dc.source.journal | na | |
imec.availability | Published - imec | |