Publication:

TCAD study of latch-up sensitivity to wafer thinning below 500 nm

Date

2021

Proceedings Paper

https://doi.org/10.1109/CAS52836.2021.9604133

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Author(s)

Hiblot, Gaspard

;

Serbulova, Kateryna

;

Hellings, Geert

;

Chen, Shih-Hung

Journal

na

Metrics

1385 since deposited on 2022-09-25

Acq. date: 2025-12-18