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A static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technology

dc.contributor.authorZhong, L.
dc.contributor.authorYang, Jiping
dc.contributor.authorHolland, K.
dc.contributor.authorGrillaert, Joost
dc.contributor.authorDevriendt, Katia
dc.contributor.authorHeylen, Nancy
dc.contributor.authorMeuris, Marc
dc.date.accessioned2021-10-14T12:00:46Z
dc.date.available2021-10-14T12:00:46Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4054
dc.sourceIIOimport
dc.titleA static model for scratches generated during aluminum chemical-mechanical polishing process: orbital technology
dc.typeJournal article
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorMeuris, Marc
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.source.peerreviewno
dc.source.beginpage1932
dc.source.endpage1938
dc.source.journalJapanese Journal of Applied Physics. Part 1: Regular Papers
dc.source.issue4A
dc.source.volume38
imec.availabilityPublished - imec


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