dc.contributor.author | Rachidi, Sana | |
dc.contributor.author | Arreghini, Antonio | |
dc.contributor.author | Verreck, Devin | |
dc.contributor.author | Donadio, Gabriele Luca | |
dc.contributor.author | Banerjee, Kaustuv | |
dc.contributor.author | Katcko, Kostantine | |
dc.contributor.author | Oniki, Yusuke | |
dc.contributor.author | Van den Bosch, Geert | |
dc.contributor.author | Rosmeulen, Maarten | |
dc.date.accessioned | 2022-11-17T15:57:23Z | |
dc.date.available | 2022-10-30T02:55:03Z | |
dc.date.available | 2022-11-17T15:57:23Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2330-7978 | |
dc.identifier.other | WOS:000869001800025 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40648.2 | |
dc.source | WOS | |
dc.title | At the Extreme of 3D-NAND Scaling: 25 nm Z-Pitch with 10 nm Word Line Cells | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Rachidi, Sana | |
dc.contributor.imecauthor | Arreghini, Antonio | |
dc.contributor.imecauthor | Verreck, Devin | |
dc.contributor.imecauthor | Donadio, Gabriele Luca | |
dc.contributor.imecauthor | Banerjee, Kaustuv | |
dc.contributor.imecauthor | Katcko, Kostantine | |
dc.contributor.imecauthor | Oniki, Yusuke | |
dc.contributor.imecauthor | Van den Bosch, Geert | |
dc.contributor.imecauthor | Rosmeulen, Maarten | |
dc.contributor.orcidimec | Rachidi, Sana::0000-0001-8581-8597 | |
dc.contributor.orcidimec | Arreghini, Antonio::0000-0002-7493-9681 | |
dc.contributor.orcidimec | Verreck, Devin::0000-0002-3833-5880 | |
dc.contributor.orcidimec | Banerjee, Kaustuv::0000-0001-8003-6211 | |
dc.contributor.orcidimec | Katcko, Kostantine::0000-0002-0576-8962 | |
dc.contributor.orcidimec | Oniki, Yusuke::0000-0002-6619-1327 | |
dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
dc.contributor.orcidimec | Rosmeulen, Maarten::0000-0002-3663-7439 | |
dc.contributor.orcidimec | Donadio, Gabriele Luca::0000-0003-1435-3897 | |
dc.identifier.doi | 10.1109/IMW52921.2022.9779303 | |
dc.identifier.eisbn | 978-1-6654-9947-7 | |
dc.source.numberofpages | 4 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 97 | |
dc.source.endpage | 100 | |
dc.source.conference | 14th IEEE International Memory Workshop (IMW) | |
dc.source.conferencedate | MAR 15-18, 2022 | |
dc.source.conferencelocation | Dresden | |
dc.source.journal | na | |
imec.availability | Published - imec | |
dc.description.wosFundingText | This work has been funded by imec's Industrial Affiliation Program on Storage Memory. | |