Thin silicon layer as heat channel for low-loss SiN tunable devices

dc.contributor.author	Caer, Charles
dc.contributor.author	Dwivedi, Sarvagya Paavan
dc.date.accessioned	2023-01-20T09:46:25Z
dc.date.available	2022-11-07T02:55:18Z
dc.date.available	2023-01-20T09:46:25Z
dc.date.issued	2021
dc.identifier.issn	2374-0140
dc.identifier.other	WOS:000866488100148
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/40691.2
dc.source	WOS
dc.title	Thin silicon layer as heat channel for low-loss SiN tunable devices
dc.type	Proceedings paper
dc.contributor.imecauthor	Caer, Charles
dc.contributor.imecauthor	Dwivedi, Sarvagya Paavan
dc.contributor.orcidimec	Caer, Charles::0000-0002-2735-2423
dc.contributor.orcidimec	Dwivedi, Sarvagya Paavan::0000-0003-1184-3225
dc.identifier.doi	10.1109/IPC48725.2021.9592989
dc.identifier.eisbn	978-1-6654-1601-6
dc.source.numberofpages	2
dc.source.peerreview	yes
dc.source.conference	Annual Conference of the IEEE-Photonics-Society (IPC)
dc.source.conferencedate	OCT 18-21, 2021
dc.source.conferencelocation	Vancouver
dc.source.journal	na
imec.availability	Published - imec

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Version	Item	Date	Summary
2	20.500.12860/40691.2*	2023-01-20T09:45:22Z	validation by library/open access desk
1	20.500.12860/40691	2022-11-07T02:55:18Z