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Thin silicon layer as heat channel for low-loss SiN tunable devices
dc.contributor.author | Caer, Charles | |
dc.contributor.author | Dwivedi, Sarvagya | |
dc.date.accessioned | 2022-11-07T02:55:18Z | |
dc.date.available | 2022-11-07T02:55:18Z | |
dc.date.issued | 2021 | |
dc.identifier.issn | 2374-0140 | |
dc.identifier.other | WOS:000866488100148 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40691 | |
dc.source | WOS | |
dc.title | Thin silicon layer as heat channel for low-loss SiN tunable devices | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Caer, Charles | |
dc.contributor.imecauthor | Dwivedi, Sarvagya | |
dc.contributor.orcidimec | Caer, Charles::0000-0002-2735-2423 | |
dc.identifier.doi | 10.1109/IPC48725.2021.9592989 | |
dc.identifier.eisbn | 978-1-6654-1601-6 | |
dc.source.numberofpages | 2 | |
dc.source.peerreview | yes | |
dc.source.conference | Annual Conference of the IEEE-Photonics-Society (IPC) | |
dc.source.conferencedate | OCT 18-21, 2021 | |
imec.availability | Under review |
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