Thin silicon layer as heat channel for low-loss SiN tunable devices

Notice

This item has not yet been validated by imec staff.

This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/40691.2

dc.contributor.author	Caer, Charles
dc.contributor.author	Dwivedi, Sarvagya
dc.date.accessioned	2022-11-07T02:55:18Z
dc.date.available	2022-11-07T02:55:18Z
dc.date.issued	2021
dc.identifier.issn	2374-0140
dc.identifier.other	WOS:000866488100148
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/40691
dc.source	WOS
dc.title	Thin silicon layer as heat channel for low-loss SiN tunable devices
dc.type	Proceedings paper
dc.contributor.imecauthor	Caer, Charles
dc.contributor.imecauthor	Dwivedi, Sarvagya
dc.contributor.orcidimec	Caer, Charles::0000-0002-2735-2423
dc.identifier.doi	10.1109/IPC48725.2021.9592989
dc.identifier.eisbn	978-1-6654-1601-6
dc.source.numberofpages	2
dc.source.peerreview	yes
dc.source.conference	Annual Conference of the IEEE-Photonics-Society (IPC)
dc.source.conferencedate	OCT 18-21, 2021
imec.availability	Under review

Files in this item

Files	Size	Format	View
There are no files associated with this item.

Version	Item	Date	Summary
2	20.500.12860/40691.2	2023-01-20T09:45:22Z	validation by library/open access desk
1	20.500.12860/40691*	2022-11-07T02:55:18Z