Publication:

Realization of Fabrication-Tolerant Si3N4-Si Mode Transformers

Date

2021

Proceedings Paper

https://doi.org/10.1109/IPC48725.2021.9592999

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Author(s)

De Witte, Jasper

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Van Thourhout, Dries

Journal

na

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Acq. date: 2026-02-25