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Realization of Fabrication-Tolerant Si3N4-Si Mode Transformers

dc.contributor.authorDe Witte, Jasper
dc.contributor.authorCuyvers, Stijn
dc.contributor.authorPoelman, Stijn
dc.contributor.authorKuyken, Bart
dc.contributor.authorVan Thourhout, Dries
dc.date.accessioned2023-01-19T16:21:38Z
dc.date.available2022-11-07T02:55:19Z
dc.date.available2023-01-19T16:21:38Z
dc.date.issued2021
dc.identifier.issn2374-0140
dc.identifier.otherWOS:000866488100157
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40693.3
dc.sourceWOS
dc.titleRealization of Fabrication-Tolerant Si3N4-Si Mode Transformers
dc.typeProceedings paper
dc.contributor.imecauthorDe Witte, Jasper
dc.contributor.imecauthorCuyvers, Stijn
dc.contributor.imecauthorPoelman, Stijn
dc.contributor.imecauthorKuyken, Bart
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidimecDe Witte, Jasper::0000-0003-1145-4676
dc.contributor.orcidimecCuyvers, Stijn::0000-0002-0943-9779
dc.contributor.orcidimecPoelman, Stijn::0000-0002-8374-1466
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.identifier.doi10.1109/IPC48725.2021.9592999
dc.identifier.eisbn978-1-6654-1601-6
dc.source.numberofpages2
dc.source.peerreviewyes
dc.source.conferenceAnnual Conference of the IEEE-Photonics-Society (IPC)
dc.source.conferencedateOCT 18-21, 2021
dc.source.conferencelocationVancouver
dc.source.journalna
imec.availabilityPublished - imec


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320.500.12860/40693.3*2023-01-19T16:20:42Zvalidation by library/open access desk
120.500.12860/406932022-11-07T02:55:19Z

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