dc.contributor.author | Baehr, Mario | |
dc.contributor.author | Kaepplinger, Indira | |
dc.contributor.author | Pobedinskas, Paulius | |
dc.contributor.author | Frank, Thomas | |
dc.contributor.author | Gruen, Andre | |
dc.contributor.author | Haenen, Ken | |
dc.contributor.author | Ortlepp, Thomas | |
dc.date.accessioned | 2023-05-16T09:43:47Z | |
dc.date.available | 2022-11-10T03:03:12Z | |
dc.date.available | 2023-05-16T09:43:47Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 1862-6300 | |
dc.identifier.other | WOS:000874117400001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40706.2 | |
dc.source | WOS | |
dc.title | Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pobedinskas, Paulius | |
dc.contributor.imecauthor | Haenen, Ken | |
dc.contributor.orcidimec | Pobedinskas, Paulius::0000-0001-8136-5172 | |
dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
dc.date.embargo | 2023-02-01 | |
dc.identifier.doi | 10.1002/pssa.202200309 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 2200309 | |
dc.source.endpage | na | |
dc.source.journal | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | |
dc.source.issue | 4 | |
dc.source.volume | 220 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | The financial support from the German federal ministry of economic affairs and energy (BMWi) within the project GeWaDiS (FKZ MF160181) was gratefully acknowledged, as well as the funding by the Methusalem NANO network. Open Access funding enabled and organized by Projekt DEAL. | |