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dc.contributor.authorBaehr, Mario
dc.contributor.authorKaepplinger, Indira
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorFrank, Thomas
dc.contributor.authorGruen, Andre
dc.contributor.authorHaenen, Ken
dc.contributor.authorOrtlepp, Thomas
dc.date.accessioned2023-05-16T09:43:47Z
dc.date.available2022-11-10T03:03:12Z
dc.date.available2023-05-16T09:43:47Z
dc.date.issued2023
dc.identifier.issn1862-6300
dc.identifier.otherWOS:000874117400001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40706.2
dc.sourceWOS
dc.titlePressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer
dc.typeJournal article
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.embargo2023-02-01
dc.identifier.doi10.1002/pssa.202200309
dc.source.numberofpages6
dc.source.peerreviewyes
dc.source.beginpageArt. 2200309
dc.source.endpagena
dc.source.journalPHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
dc.source.issue4
dc.source.volume220
imec.availabilityPublished - open access
dc.description.wosFundingTextThe financial support from the German federal ministry of economic affairs and energy (BMWi) within the project GeWaDiS (FKZ MF160181) was gratefully acknowledged, as well as the funding by the Methusalem NANO network. Open Access funding enabled and organized by Projekt DEAL.


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