Publication:

Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer

Date

2023
Journal article
https://doi.org/10.1002/pssa.202200309
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Published version 2.99 MB

Author(s)

Baehr, Mario
;
Kaepplinger, Indira
;
Pobedinskas, Paulius  
;
Frank, Thomas
;
Gruen, Andre
;
Haenen, Ken  
;
Ortlepp, Thomas

Journal

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE

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223 since deposited on 2022-11-10
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