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Articles
Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer
Publication:
Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer
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Date
2023
Journal article
https://doi.org/10.1002/pssa.202200309
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baehr, Mario
;
Kaepplinger, Indira
;
Pobedinskas, Paulius
;
Frank, Thomas
;
Gruen, Andre
;
Haenen, Ken
;
Ortlepp, Thomas
Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
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Downloads
205
since deposited on 2022-11-10
10
last month
2
last week
Acq. date: 2025-12-15
Views
1220
since deposited on 2022-11-10
Acq. date: 2025-12-15
Citations