Publication:

Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer

Date

2023
Journal article
https://doi.org/10.1002/pssa.202200309
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dc.contributor.authorBaehr, Mario
dc.contributor.authorKaepplinger, Indira
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorFrank, Thomas
dc.contributor.authorGruen, Andre
dc.contributor.authorHaenen, Ken
dc.contributor.authorOrtlepp, Thomas
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorHaenen, Ken
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.date.accessioned2023-05-16T09:43:47Z
dc.date.available2022-11-10T03:03:12Z
dc.date.available2023-05-16T09:43:47Z
dc.date.embargo2023-02-01
dc.date.issued2023
dc.description.wosFundingTextThe financial support from the German federal ministry of economic affairs and energy (BMWi) within the project GeWaDiS (FKZ MF160181) was gratefully acknowledged, as well as the funding by the Methusalem NANO network. Open Access funding enabled and organized by Projekt DEAL.
dc.identifier.doi10.1002/pssa.202200309
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40706
dc.publisherWILEY-V C H VERLAG GMBH
dc.source.beginpageArt. 2200309
dc.source.endpagena
dc.source.issue4
dc.source.journalPHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
dc.source.numberofpages6
dc.source.volume220
dc.subject.keywordsMICROWAVE
dc.subject.keywordsFILMS
dc.subject.keywordsCVD
dc.subject.keywordsSUBSTRATE
dc.title

Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer

dc.typeJournal article
dspace.entity.typePublication
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