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Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer
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Authors
Baehr, Mario
;
Kaepplinger, Indira
;
Pobedinskas, Paulius
;
Frank, Thomas
;
Gruen, Andre
;
Haenen, Ken
;
Ortlepp, Thomas
DOI
10.1002/pssa.202200309
ISSN
1862-6300
Issue
4
Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume
220
Title
Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer
Publication type
Journal article
Embargo date
2023-02-01
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Summary
2
20.500.12860/40706.2
*
2023-05-16T09:40:54Z
validation by library/open access desk
1
20.500.12860/40706
2022-11-10T03:03:12Z
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