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Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer
dc.contributor.author | Baehr, Mario | |
dc.contributor.author | Kaepplinger, Indira | |
dc.contributor.author | Pobedinskas, Paulius | |
dc.contributor.author | Frank, Thomas | |
dc.contributor.author | Gruen, Andre | |
dc.contributor.author | Haenen, Ken | |
dc.contributor.author | Ortlepp, Thomas | |
dc.date.accessioned | 2022-11-10T03:03:12Z | |
dc.date.available | 2022-11-10T03:03:12Z | |
dc.date.issued | 2022-OCT 27 | |
dc.identifier.issn | 1862-6300 | |
dc.identifier.other | WOS:000874117400001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40706 | |
dc.source | WOS | |
dc.title | Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer | |
dc.type | Journal article | |
dc.type | Journal article (pre-print) | |
dc.contributor.imecauthor | Pobedinskas, Paulius | |
dc.contributor.imecauthor | Haenen, Ken | |
dc.contributor.orcidimec | Pobedinskas, Paulius::0000-0001-8136-5172 | |
dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
dc.identifier.doi | 10.1002/pssa.202200309 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.journal | PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE | |
imec.availability | Under review |
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