Authors

Augendre, Emmanuel; Rooyackers, Rita; Caymax, Matty; Vandamme, Ewout; De Keersgieter, An; Perello, Carles; Van Dievel, Marc; Pochet, Sandrine; Badenes, Gonçal

Issue

7

Journal

IEEE Trans. Electron Devices

Volume

47

Title

Elevated source/drain by sacrificial selective epitaxy for high performance deep submicron CMOS: process window versus complexity

Publication type

Journal article

Embargo date

9999-12-31