dc.contributor.author | Joi, A. | |
dc.contributor.author | Lesniewska, Alicja | |
dc.contributor.author | Dictus, Dries | |
dc.contributor.author | Tso, K. C. | |
dc.contributor.author | Venkatraman, K. | |
dc.contributor.author | Dordi, J. | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Yadav, S. K. | |
dc.contributor.author | Wu, P. W. | |
dc.date.accessioned | 2023-02-20T14:47:21Z | |
dc.date.available | 2022-11-30T03:11:11Z | |
dc.date.available | 2023-02-20T14:47:21Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 0021-8979 | |
dc.identifier.other | WOS:000880314300003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40805.2 | |
dc.source | WOS | |
dc.title | Doped Ru to enable next generation barrier-less interconnect | |
dc.type | Journal article | |
dc.contributor.imecauthor | Lesniewska, Alicja | |
dc.contributor.imecauthor | Dictus, Dries | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Lesniewska, Alicja::0000-0003-3863-065X | |
dc.contributor.orcidimec | Dictus, Dries::0000-0002-7896-1747 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.date.embargo | 2023-11-03 | |
dc.identifier.doi | 10.1063/5.0108688 | |
dc.source.numberofpages | 11 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 175704 | |
dc.source.endpage | na | |
dc.source.journal | JOURNAL OF APPLIED PHYSICS | |
dc.source.issue | 17 | |
dc.source.volume | 132 | |
imec.availability | Published - imec | |