Doped Ru to enable next generation barrier-less interconnect

Joi, A.; Lesniewska, Alicja; Dictus, Dries; Tso, K. C.; Venkatraman, K.; Dordi, J.; Croes, Kristof; Tokei, Zsolt; Yadav, S. K.; Wu, P. W.

doi:10.1063/5.0108688

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Doped Ru to enable next generation barrier-less interconnect

Date

2022

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https://doi.org/10.1063/5.0108688

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JOURNAL OF APPLIED PHYSICS

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Doped Ru to enable next generation barrier-less interconnect

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