Publication:

Doped Ru to enable next generation barrier-less interconnect

Date

2022
Journal article
https://doi.org/10.1063/5.0108688
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Author(s)

Joi, A.
;
Lesniewska, Alicja  
;
Dictus, Dries  
;
Tso, K. C.
;
Venkatraman, K.
;
Dordi, J.
;
Croes, Kristof  
;
Tokei, Zsolt  
;
Yadav, S. K.
;
Wu, P. W.

Journal

JOURNAL OF APPLIED PHYSICS

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596 since deposited on 2022-11-30
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