Publication:

Doped Ru to enable next generation barrier-less interconnect

Date

2022
Journal article
https://doi.org/10.1063/5.0108688
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dc.contributor.authorJoi, A.
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorDictus, Dries
dc.contributor.authorTso, K. C.
dc.contributor.authorVenkatraman, K.
dc.contributor.authorDordi, J.
dc.contributor.authorCroes, Kristof
dc.contributor.authorTokei, Zsolt
dc.contributor.authorYadav, S. K.
dc.contributor.authorWu, P. W.
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorDictus, Dries
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecDictus, Dries::0000-0002-7896-1747
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.accessioned2023-02-20T14:47:21Z
dc.date.available2022-11-30T03:11:11Z
dc.date.available2023-02-20T14:47:21Z
dc.date.embargo2023-11-03
dc.date.issued2022
dc.identifier.doi10.1063/5.0108688
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/40805
dc.publisherAIP Publishing
dc.source.beginpage175704
dc.source.endpagena
dc.source.issue17
dc.source.journalJOURNAL OF APPLIED PHYSICS
dc.source.numberofpages11
dc.source.volume132
dc.subject.keywordsTOTAL-ENERGY CALCULATIONS
dc.title

Doped Ru to enable next generation barrier-less interconnect

dc.typeJournal article
dspace.entity.typePublication
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