Notice
This item has not yet been validated by imec staff.
Notice
This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/40805.2
Doped Ru to enable next generation barrier-less interconnect
dc.contributor.author | Joi, A. | |
dc.contributor.author | Lesniewska, A. | |
dc.contributor.author | Dictus, D. | |
dc.contributor.author | Tso, K. C. | |
dc.contributor.author | Venkatraman, K. | |
dc.contributor.author | Dordi, Y. | |
dc.contributor.author | Croes, K. | |
dc.contributor.author | Tokei, Z. | |
dc.contributor.author | Yadav, S. K. | |
dc.contributor.author | Wu, P. W. | |
dc.date.accessioned | 2022-11-30T03:11:11Z | |
dc.date.available | 2022-11-30T03:11:11Z | |
dc.date.issued | 2022-NOV 7 | |
dc.identifier.issn | 0021-8979 | |
dc.identifier.other | WOS:000880314300003 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40805 | |
dc.source | WOS | |
dc.title | Doped Ru to enable next generation barrier-less interconnect | |
dc.type | Journal article | |
dc.contributor.imecauthor | Lesniewska, A. | |
dc.contributor.imecauthor | Croes, K. | |
dc.contributor.imecauthor | Tokei, Z. | |
dc.identifier.doi | 10.1063/5.0108688 | |
dc.source.numberofpages | 11 | |
dc.source.peerreview | yes | |
dc.source.journal | JOURNAL OF APPLIED PHYSICS | |
dc.source.issue | 17 | |
dc.source.volume | 132 | |
imec.availability | Under review |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |