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Challenges for deep-submicron CMOS integration

dc.contributor.authorBadenes, Gonçal
dc.contributor.authorDeferm, Ludo
dc.date.accessioned2021-10-14T12:39:59Z
dc.date.available2021-10-14T12:39:59Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4080
dc.sourceIIOimport
dc.titleChallenges for deep-submicron CMOS integration
dc.typeProceedings paper
dc.contributor.imecauthorDeferm, Ludo
dc.source.peerreviewno
dc.source.beginpage23
dc.source.endpage30
dc.source.conferenceProceedings of the XV SBmicro International Conference on Microelectronics and Packaging; 18-23 September 2000; Manaus, Brazil.
dc.source.conferencelocation
imec.availabilityPublished - imec


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