dc.contributor.author | Aabdin, Zainul | |
dc.contributor.author | Ghosh, Tanmay | |
dc.contributor.author | Pacco, Antoine | |
dc.contributor.author | Raj, Sanoj | |
dc.contributor.author | Do, Hue Thi Bich | |
dc.contributor.author | Saidov, Khakimjon | |
dc.contributor.author | Weei, Tjiu Weng | |
dc.contributor.author | Anand, Utkarsh | |
dc.contributor.author | Kral, Petr | |
dc.contributor.author | Holsteyns, Frank | |
dc.contributor.author | Bosman, Michel | |
dc.contributor.author | Mirsaidov, Utkur | |
dc.date.accessioned | 2023-04-27T14:08:25Z | |
dc.date.available | 2022-12-03T03:08:21Z | |
dc.date.available | 2023-04-27T14:08:25Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 2637-6113 | |
dc.identifier.other | WOS:000885513100001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40815.2 | |
dc.source | WOS | |
dc.title | Controlling the Wet-Etch Directionality in Nanostructured Silicon | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pacco, Antoine | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.orcidimec | Pacco, Antoine::0000-0001-6330-5053 | |
dc.contributor.orcidimec | Holsteyns, Frank::0009-0002-2123-452X | |
dc.identifier.doi | 10.1021/acsaelm.2c00824 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 5191 | |
dc.source.endpage | 5198 | |
dc.source.journal | ACS APPLIED ELECTRONIC MATERIALS | |
dc.source.issue | 11 | |
dc.source.volume | 4 | |
imec.availability | Published - imec | |
dc.description.wosFundingText | This work was supported by Singapore's National Research Foundation (NRF) under the Competitive Research Programme (NRFCRP16-2015-05) . | |