Controlling the Wet-Etch Directionality in Nanostructured Silicon

Aabdin, Zainul; Ghosh, Tanmay; Pacco, Antoine; Raj, Sanoj; Do, Hue Thi Bich; Saidov, Khakimjon; Weei, Tjiu Weng; Anand, Utkarsh; Kral, Petr; Holsteyns, Frank; Bosman, Michel; Mirsaidov, Utkur

doi:10.1021/acsaelm.2c00824

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Controlling the Wet-Etch Directionality in Nanostructured Silicon

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2022

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https://doi.org/10.1021/acsaelm.2c00824

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ACS APPLIED ELECTRONIC MATERIALS

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1538 since deposited on 2022-12-03

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Acq. date: 2026-09-01

Controlling the Wet-Etch Directionality in Nanostructured Silicon

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