Publication:

Controlling the Wet-Etch Directionality in Nanostructured Silicon

Date

2022

Journal article

https://doi.org/10.1021/acsaelm.2c00824

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Author(s)

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Do, Hue Thi Bich

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Saidov, Khakimjon

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Weei, Tjiu Weng

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Holsteyns, Frank

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Mirsaidov, Utkur

Journal

ACS APPLIED ELECTRONIC MATERIALS

Metrics

1529 since deposited on 2022-12-03

Acq. date: 2025-12-11