Publication:

Controlling the Wet-Etch Directionality in Nanostructured Silicon

Date

2022

Journal article

https://doi.org/10.1021/acsaelm.2c00824

Simple item page Full metadata Statistics

Author(s)

;

;

;

;

Do, Hue Thi Bich

;

Saidov, Khakimjon

;

Weei, Tjiu Weng

;

;

;

Holsteyns, Frank

;

;

Mirsaidov, Utkur

Journal

ACS APPLIED ELECTRONIC MATERIALS

Statistics

1530 since deposited on 2022-12-03

Acq. date: 2026-02-26