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Characterisation of porous dielectric films by ellipsometric porosimetry

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMogilnikov, K. P.
dc.date.accessioned2021-10-14T12:40:10Z
dc.date.available2021-10-14T12:40:10Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4089
dc.sourceIIOimport
dc.titleCharacterisation of porous dielectric films by ellipsometric porosimetry
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage491
dc.source.endpage496
dc.source.journalOptica Applicata
dc.source.issue4
dc.source.volume30
imec.availabilityPublished - imec
imec.internalnotes5th European Seminar "Porous Glasses - Special Glasses", Wroslaw, Poland, Sept. 2000


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