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Determination of pore size distribution in thin films by ellipsometric posimetry

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorMogilnikov, K. P.
dc.contributor.authorPolovinkin, V. G.
dc.contributor.authorDultsev, F. N.
dc.date.accessioned2021-10-14T12:40:12Z
dc.date.available2021-10-14T12:40:12Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4091
dc.sourceIIOimport
dc.titleDetermination of pore size distribution in thin films by ellipsometric posimetry
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage1385
dc.source.endpage1391
dc.source.journalJ. Vacuum Science and Technology B
dc.source.issue3
dc.source.volume18
imec.availabilityPublished - open access


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