Determination of pore size distribution in thin films by ellipsometric posimetry

View/open

4059.pdf (98.70Kb)

Metadata

Show full item record

Authors

Baklanov, Mikhaïl; Mogilnikov, K. P.; Polovinkin, V. G.; Dultsev, F. N.

Issue

3

Journal

J. Vacuum Science and Technology B

Volume

18

Title

Determination of pore size distribution in thin films by ellipsometric posimetry

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles