Determination of pore size distribution in thin films by ellipsometric posimetry

dc.contributor.author	Baklanov, Mikhaïl
dc.contributor.author	Mogilnikov, K. P.
dc.contributor.author	Polovinkin, V. G.
dc.contributor.author	Dultsev, F. N.
dc.date.accessioned	2021-10-14T12:40:12Z
dc.date.available	2021-10-14T12:40:12Z
dc.date.embargo	9999-12-31
dc.date.issued	2000
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4091
dc.source.beginpage	1385
dc.source.endpage	1391
dc.source.issue	3
dc.source.journal	J. Vacuum Science and Technology B
dc.source.volume	18
dc.title	Determination of pore size distribution in thin films by ellipsometric posimetry
dc.type	Journal article
dspace.entity.type	Publication
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