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Determination of pore size distribution in thin films by ellipsometric posimetry
Publication:
Determination of pore size distribution in thin films by ellipsometric posimetry
Date
2000
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baklanov, Mikhaïl
;
Mogilnikov, K. P.
;
Polovinkin, V. G.
;
Dultsev, F. N.
Journal
J. Vacuum Science and Technology B
Abstract
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1912
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1912
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations