Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Determination of pore size distribution in thin films by ellipsometric posimetry
Publication:
Determination of pore size distribution in thin films by ellipsometric posimetry
Copy permalink
Date
2000
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
4059.pdf
98.71 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baklanov, Mikhaïl
;
Mogilnikov, K. P.
;
Polovinkin, V. G.
;
Dultsev, F. N.
Journal
J. Vacuum Science and Technology B
Abstract
Description
Metrics
Views
1916
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-11
Citations
Metrics
Views
1916
since deposited on 2021-10-14
1
last month
Acq. date: 2025-12-11
Citations