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An inner gate as enabler for vertical pitch scaling in macaroni channel gate-all-around 3-D NAND flash memory
dc.contributor.author | Verreck, D. | |
dc.contributor.author | Arreghini, A. | |
dc.contributor.author | Bosch, G. Van den | |
dc.contributor.author | Rosmeulen, M. | |
dc.date.accessioned | 2023-01-23T03:17:50Z | |
dc.date.available | 2023-01-23T03:17:50Z | |
dc.date.issued | 2023-JAN | |
dc.identifier.issn | 0038-1101 | |
dc.identifier.other | WOS:000900139700007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41017 | |
dc.source | WOS | |
dc.title | An inner gate as enabler for vertical pitch scaling in macaroni channel gate-all-around 3-D NAND flash memory | |
dc.type | Journal article | |
dc.contributor.imecauthor | Verreck, D. | |
dc.contributor.imecauthor | Arreghini, A. | |
dc.contributor.imecauthor | Bosch, G. Van den | |
dc.contributor.imecauthor | Rosmeulen, M. | |
dc.identifier.doi | 10.1016/j.sse.2022.108498 | |
dc.source.numberofpages | 3 | |
dc.source.peerreview | yes | |
dc.source.journal | SOLID-STATE ELECTRONICS | |
dc.source.volume | 199 | |
imec.availability | Under review |
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