Notice
This item has not yet been validated by imec staff.
Notice
This is not the latest version of this item. The latest version can be found at: https://imec-publications.be/handle/20.500.12860/41061.3
Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet
dc.contributor.author | Saadeh, Qais | |
dc.contributor.author | Philipsen, Vicky | |
dc.contributor.author | Thakare, Devesh | |
dc.contributor.author | Naujok, Philipp | |
dc.contributor.author | Wu, Meiyi | |
dc.contributor.author | Scholze, Frank | |
dc.contributor.author | Buchholz, Christian | |
dc.contributor.author | Tagbo-fotso, Claudia | |
dc.contributor.author | Babalik, Ayhan | |
dc.contributor.author | Kupper, Bettina | |
dc.contributor.author | Soltwisch, Victor | |
dc.date.accessioned | 2023-02-06T09:04:38Z | |
dc.date.available | 2023-02-05T03:20:16Z | |
dc.date.available | 2023-02-06T09:04:38Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2159-3930 | |
dc.identifier.other | WOS:000906989700007 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41061.2 | |
dc.source | WOS | |
dc.title | Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet | |
dc.type | Journal article | |
dc.contributor.imecauthor | Philipsen, Vicky | |
dc.contributor.imecauthor | Thakare, Devesh | |
dc.contributor.imecauthor | Wu, Meiyi | |
dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
dc.contributor.orcidimec | Thakare, Devesh::0000-0003-3265-7042 | |
dc.identifier.doi | 10.1364/OME.474887 | |
dc.source.numberofpages | 14 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 78 | |
dc.source.endpage | 91 | |
dc.source.journal | OPTICAL MATERIALS EXPRESS | |
dc.source.issue | 1 | |
dc.source.volume | 13 | |
imec.availability | Under review |
Files in this item
Files | Size | Format | View |
---|---|---|---|
There are no files associated with this item. |