Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Articles
View item
imec Publications Repository
imec Publications
Articles
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet
View/
open
Published version (2.899Mb)
Metadata
Show full item record
Authors
Saadeh, Qais
;
Philipsen, Vicky
;
Thakare, Devesh
;
Naujok, Philipp
;
Wu, Meiyi
;
Scholze, Frank
;
Buchholz, Christian
;
Tagbo-fotso, Claudia
;
Babalik, Ayhan
;
Kupper, Bettina
;
Soltwisch, Victor
DOI
10.1364/OME.474887
ISSN
2159-3930
Issue
1
Journal
OPTICAL MATERIALS EXPRESS
Volume
13
Title
Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet
Publication type
Journal article
Embargo date
2023-01-01
Collections
Articles
Version history
Version
Item
Date
Summary
3
20.500.12860/41061.3
*
2023-07-07T07:15:03Z
validation by library/open access desk
2
20.500.12860/41061.2
2023-02-06T08:29:12Z
validation by imec author
1
20.500.12860/41061
2023-02-05T03:20:16Z
*Selected version
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login