Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet

Saadeh, Qais; Philipsen, Vicky; Thakare, Devesh; Naujok, Philipp; Wu, Meiyi; Scholze, Frank; Buchholz, Christian; Tagbo-fotso, Claudia; Babalik, Ayhan; Kupper, Bettina; Soltwisch, Victor

doi:10.1364/OME.474887

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Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet

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2023

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https://doi.org/10.1364/OME.474887

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OPTICAL MATERIALS EXPRESS

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387 since deposited on 2023-02-05

Acq. date: 2026-06-23

1219 since deposited on 2023-02-05

Acq. date: 2026-06-23

Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet

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