Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet

Saadeh, Qais; Philipsen, Vicky; Thakare, Devesh; Naujok, Philipp; Wu, Meiyi; Scholze, Frank; Buchholz, Christian; Tagbo-fotso, Claudia; Babalik, Ayhan; Kupper, Bettina; Soltwisch, Victor

doi:10.1364/OME.474887

Publication:

Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet

Date

2023

Journal article

https://doi.org/10.1364/OME.474887

Simple item page Full metadata Statistics

Files

Published version 2.9 MB

Author(s)

;

;

;

;

;

;

;

;

;

;

Journal

OPTICAL MATERIALS EXPRESS

Statistics

366 since deposited on 2023-02-05

13last month

3last week

Acq. date: 2026-04-26

1218 since deposited on 2023-02-05

1last month

Acq. date: 2026-04-26

Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet

Date

Files

Author(s)

Journal

Abstract

Description

Statistics

Downloads

Views

Citations

Statistics

Downloads

Views

Citations