Publication:

Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet

Date

2023
Journal article
https://doi.org/10.1364/OME.474887
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dc.contributor.authorSaadeh, Qais
dc.contributor.authorPhilipsen, Vicky
dc.contributor.authorThakare, Devesh
dc.contributor.authorNaujok, Philipp
dc.contributor.authorWu, Meiyi
dc.contributor.authorScholze, Frank
dc.contributor.authorBuchholz, Christian
dc.contributor.authorTagbo-fotso, Claudia
dc.contributor.authorBabalik, Ayhan
dc.contributor.authorKupper, Bettina
dc.contributor.authorSoltwisch, Victor
dc.contributor.imecauthorPhilipsen, Vicky
dc.contributor.imecauthorThakare, Devesh
dc.contributor.imecauthorWu, Meiyi
dc.contributor.orcidimecPhilipsen, Vicky::0000-0002-2959-432X
dc.contributor.orcidimecThakare, Devesh::0000-0003-3265-7042
dc.date.accessioned2023-07-07T07:16:17Z
dc.date.available2023-02-05T03:20:16Z
dc.date.available2023-02-06T09:04:38Z
dc.date.available2023-07-07T07:16:17Z
dc.date.embargo2023-01-01
dc.date.issued2023
dc.description.wosFundingTextElectronic Components and Systems for European Leadership (783247) ; European Metrology Programme for Innovation and Research (20IND04) .
dc.identifier.doi10.1364/OME.474887
dc.identifier.issn2159-3930
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41061
dc.publisherOptica Publishing Group
dc.source.beginpage78
dc.source.endpage91
dc.source.issue1
dc.source.journalOPTICAL MATERIALS EXPRESS
dc.source.numberofpages14
dc.source.volume13
dc.subject.keywordsSOFT-X-RAY
dc.subject.keywordsK ABSORPTION EDGES
dc.subject.keywordsPHOTOABSORPTION
dc.subject.keywordsREFLECTIVITY
dc.subject.keywordsEUV masks
dc.subject.keywordsEUV wavelength range
dc.subject.keywordstantalum
dc.subject.keywordscobalt
dc.subject.keywordsoptical material properties
dc.title

Tunability of the optical constants of tantalum-cobalt alloy thin films in the extreme ultraviolet

dc.typeJournal article
dspace.entity.typePublication
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