Show simple item record

Co-integration Process Compatible Input/Output (I/O) Device Options for GAA Nanosheet Technology

dc.contributor.authorGaddemane, Gautam
dc.contributor.authorBhuwalka, Krishna K.
dc.contributor.authorMatagne, Philippe
dc.contributor.authorRzepa, Gerhard
dc.contributor.authorVan de Put, Maarten
dc.contributor.authorSantermans, Sybren
dc.contributor.authorBaumgartner, Oskar
dc.contributor.authorWu, Hao
dc.contributor.authorHellings, Geert
dc.date.accessioned2023-04-26T09:27:27Z
dc.date.available2023-02-09T03:20:56Z
dc.date.available2023-02-17T13:24:55Z
dc.date.available2023-04-26T09:27:27Z
dc.date.issued2022
dc.identifier.issn1930-8876
dc.identifier.otherWOS:000904209900013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41072.3
dc.sourceWOS
dc.titleCo-integration Process Compatible Input/Output (I/O) Device Options for GAA Nanosheet Technology
dc.typeProceedings paper
dc.contributor.imecauthorGaddemane, Gautam
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorVan de Put, Maarten
dc.contributor.imecauthorSantermans, Sybren
dc.contributor.imecauthorHellings, Geert
dc.contributor.orcidimecSantermans, Sybren::0000-0002-0843-102X
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecVan de Put, Maarten::0000-0001-9179-6443
dc.identifier.doi10.1109/ESSDERC55479.2022.9947139
dc.identifier.eisbn978-1-6654-8497-8
dc.source.numberofpages4
dc.source.peerreviewyes
dc.source.beginpage265
dc.source.endpage268
dc.source.conference52nd IEEE European Solid-State Device Research Conference (ESSDERC)
dc.source.conferencedateSEP 19-22, 2022
dc.source.conferencelocationMilan
dc.source.journalna
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record

Version history

VersionItemDateSummary
320.500.12860/41072.3*2023-04-26T09:25:56Zvalidation by library/open access desk
220.500.12860/41072.22023-02-17T13:18:47Zvalidation by imec author
120.500.12860/410722023-02-09T03:20:56Z

*Selected version