dc.contributor.author | Dey, Bappaditya | |
dc.contributor.author | Dehaerne, Enrique | |
dc.contributor.author | Halder, Sandip | |
dc.date.accessioned | 2023-06-14T09:47:51Z | |
dc.date.available | 2023-02-15T03:23:33Z | |
dc.date.available | 2023-02-16T15:54:35Z | |
dc.date.available | 2023-06-14T09:47:51Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000905312400004 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41095.3 | |
dc.source | WOS | |
dc.title | Towards Improving Challenging Stochastic Defect Detection in SEM Images Based on Improved YOLOv5 | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Dey, Bappaditya | |
dc.contributor.imecauthor | Dehaerne, Enrique | |
dc.contributor.imecauthor | Halder, Sandip | |
dc.contributor.orcidimec | Dey, Bappaditya::0000-0002-0886-137X | |
dc.contributor.orcidimec | Halder, Sandip::0000-0002-6314-2685 | |
dc.identifier.doi | 10.1117/12.2645402 | |
dc.identifier.eisbn | 978-1-5106-5642-0 | |
dc.source.numberofpages | 10 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 1229305 | |
dc.source.conference | Photomask Technology Conference | |
dc.source.conferencedate | SEP 26-29, 2022 | |
dc.source.conferencelocation | Monterey | |
dc.source.journal | Proceedings of SPIE | |
dc.source.volume | 12293 | |
imec.availability | Published - imec | |