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Application of focused ion beam for failure analysis

dc.contributor.authorBender, Hugo
dc.date.accessioned2021-10-14T12:40:42Z
dc.date.available2021-10-14T12:40:42Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4111
dc.sourceIIOimport
dc.titleApplication of focused ion beam for failure analysis
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage45
dc.source.endpage53
dc.source.conferenceMIDEM - 35th International Conference on Microelectronics, Devices and Materials and Workshop on Microsystems
dc.source.conferencedate18/10/2000
dc.source.conferencelocationPostojna Slovenia
imec.availabilityPublished - open access


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