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Focused ion beam analysis of organic low-k dielectrics

dc.contributor.authorBender, Hugo
dc.contributor.authorAlves Donaton, Ricardo
dc.date.accessioned2021-10-14T12:40:47Z
dc.date.available2021-10-14T12:40:47Z
dc.date.issued2000
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/4114
dc.sourceIIOimport
dc.titleFocused ion beam analysis of organic low-k dielectrics
dc.typeProceedings paper
dc.contributor.imecauthorBender, Hugo
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage397
dc.source.endpage405
dc.source.conferenceProceedings of the 26th International Symposium on Testing and Failure Analysis - ISTFA
dc.source.conferencedate12/11/2000
dc.source.conferencelocationBellevue, WA USA
imec.availabilityPublished - open access


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