Combining SILC and BD statistics for low-voltage lifetime projection in HK/MG stacks

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dc.contributor.author	Vici, Andrea
dc.contributor.author	Degraeve, Robin
dc.contributor.author	Bastos, Joao Pedro
dc.contributor.author	Roussel, Philippe
dc.contributor.author	De Wolf, Ingrid
dc.date.accessioned	2023-02-27T03:28:16Z
dc.date.available	2023-02-27T03:28:16Z
dc.date.issued	2022
dc.identifier.issn	1541-7026
dc.identifier.other	WOS:000922926400126
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/41167
dc.source	WOS
dc.title	Combining SILC and BD statistics for low-voltage lifetime projection in HK/MG stacks
dc.type	Proceedings paper
dc.contributor.imecauthor	Vici, Andrea
dc.contributor.imecauthor	Degraeve, Robin
dc.contributor.imecauthor	Bastos, Joao Pedro
dc.contributor.imecauthor	Roussel, Philippe
dc.contributor.imecauthor	De Wolf, Ingrid
dc.contributor.orcidimec	Roussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimec	De Wolf, Ingrid::0000-0003-3822-5953
dc.identifier.doi	10.1109/IRPS48227.2022.9764555
dc.identifier.eisbn	978-1-6654-7950-9
dc.source.numberofpages	5
dc.source.peerreview	yes
dc.source.conference	IEEE International Reliability Physics Symposium (IRPS)
dc.source.conferencedate	MAR 27-31, 2022
dc.source.conferencelocation	Dallas
imec.availability	Under review

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Version	Item	Date	Summary
3	20.500.12860/41167.3	2023-04-26T09:34:30Z	validation by library/open access desk
1	20.500.12860/41167*	2023-02-27T03:28:16Z