Attenuated phase shift masks: an interview with Andreas Erdmann
| dc.contributor.author | Gallagher, Emily | |
| dc.date.accessioned | 2023-04-25T10:30:27Z | |
| dc.date.available | 2023-03-01T03:27:46Z | |
| dc.date.available | 2023-03-07T21:39:37Z | |
| dc.date.available | 2023-04-25T10:30:27Z | |
| dc.date.issued | 2022-12-28 | |
| dc.identifier.issn | 1932-5150 | |
| dc.identifier.other | WOS:000924949300003 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41204.3 | |
| dc.source | WOS | |
| dc.title | Attenuated phase shift masks: an interview with Andreas Erdmann | |
| dc.type | Editorial material | |
| dc.contributor.imecauthor | Gallagher, Emily | |
| dc.contributor.orcidimec | Gallagher, Emily::0000-0002-2927-8298 | |
| dc.date.embargo | 9999-12-31 | |
| dc.identifier.doi | 10.1117/1.JMM.21.4.040402 | |
| dc.source.numberofpages | 1 | |
| dc.source.peerreview | no | |
| dc.subject.discipline | Engineering | |
| dc.source.beginpage | 1 | |
| dc.source.endpage | 1 | |
| dc.source.journal | JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 | |
| dc.source.issue | 4 | |
| dc.source.volume | 21 | |
| imec.availability | Published - imec |