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Attenuated phase shift masks: an interview with Andreas Erdmann
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Authors
Gallagher, Emily
DOI
10.1117/1.JMM.21.4.040402
ISSN
1932-5150
Issue
4
Journal
JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
Volume
21
Research discipline
Engineering
Title
Attenuated phase shift masks: an interview with Andreas Erdmann
Publication type
Editorial material
Embargo date
9999-12-31
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3
20.500.12860/41204.3
*
2023-04-25T10:29:50Z
validation by library/open access desk
2
20.500.12860/41204.2
2023-03-04T19:11:43Z
validation by imec author
1
20.500.12860/41204
2023-03-01T03:27:46Z
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