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dc.contributor.authorNye, Rachel
dc.contributor.authorVan Dongen, Kaat
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorOKa, Hironori
dc.contributor.authorParsons, Gregory N.
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2023-07-24T10:21:56Z
dc.date.available2023-03-20T03:38:27Z
dc.date.available2023-07-24T10:21:56Z
dc.date.issued2023
dc.identifier.issn0897-4756
dc.identifier.otherWOS:000937018300001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41315.2
dc.sourceWOS
dc.titleEnhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition
dc.typeJournal article
dc.contributor.imecauthorNye, Rachel
dc.contributor.imecauthorVan Dongen, Kaat
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorOKa, Hironori
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.identifier.doi10.1021/acs.chemmater.2c03404
dc.source.numberofpages11
dc.source.peerreviewyes
dc.source.beginpage2016
dc.source.endpage2026
dc.source.journalCHEMISTRY OF MATERIALS
dc.source.issue5
dc.source.volume35
imec.availabilityPublished - imec


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