Publication:
Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition
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1149 since deposited on 2023-03-20
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Acq. date: 2026-01-06
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1149 since deposited on 2023-03-20
2last month
2last week
Acq. date: 2026-01-06
Citations