Publication:

Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition

Date

2023
Journal article
https://doi.org/10.1021/acs.chemmater.2c03404
Simple item page Full metadata Statistics
 
dc.contributor.authorNye, Rachel
dc.contributor.authorVan Dongen, Kaat
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorOKa, Hironori
dc.contributor.authorParsons, Gregory N.
dc.contributor.authorDelabie, Annelies
dc.contributor.imecauthorNye, Rachel
dc.contributor.imecauthorVan Dongen, Kaat
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorOKa, Hironori
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.date.accessioned2023-07-24T10:21:56Z
dc.date.available2023-03-20T03:38:27Z
dc.date.available2023-07-24T10:21:56Z
dc.date.issued2023
dc.identifier.doi10.1021/acs.chemmater.2c03404
dc.identifier.issn0897-4756
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41315
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage2016
dc.source.endpage2026
dc.source.issue5
dc.source.journalCHEMISTRY OF MATERIALS
dc.source.numberofpages11
dc.source.volume35
dc.subject.keywordsATOMIC LAYER DEPOSITION
dc.subject.keywordsPOLY(METHYL METHACRYLATE)
dc.subject.keywordsTITANIUM-DIOXIDE
dc.subject.keywordsSURFACE
dc.subject.keywordsTIO2
dc.subject.keywordsALD
dc.subject.keywordsTRIMETHYLALUMINUM
dc.subject.keywordsPASSIVATION
dc.subject.keywordsMECHANISMS
dc.subject.keywordsGROWTH
dc.title

Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles