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Scaling and readiness of underlayers for high-NA EUV lithography
dc.contributor.author | Fallica, Roberto | |
dc.contributor.author | De Simone, Danilo | |
dc.contributor.author | Chen, Steven | |
dc.contributor.author | Safdar, Muhammad | |
dc.contributor.author | Suh, Hyo Seon | |
dc.date.accessioned | 2023-03-22T03:40:58Z | |
dc.date.available | 2023-03-22T03:40:58Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 0277-786X | |
dc.identifier.other | WOS:000944102600030 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41329 | |
dc.source | WOS | |
dc.title | Scaling and readiness of underlayers for high-NA EUV lithography | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Fallica, Roberto | |
dc.contributor.imecauthor | De Simone, Danilo | |
dc.contributor.imecauthor | Chen, Steven | |
dc.contributor.imecauthor | Safdar, Muhammad | |
dc.contributor.imecauthor | Suh, Hyo Seon | |
dc.contributor.orcidimec | Fallica, Roberto::0000-0003-4523-9624 | |
dc.contributor.orcidimec | De Simone, Danilo::0000-0003-3927-5207 | |
dc.identifier.doi | 10.1117/12.2645864 | |
dc.identifier.eisbn | 978-1-5106-5640-6 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.conference | International Conference on Extreme Ultraviolet Lithography | |
dc.source.conferencedate | SEP 26-29, 2022 | |
dc.source.conferencelocation | Monterey | |
dc.source.volume | 12292 | |
imec.availability | Under review |
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