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Assessment of STI dry etch process variability by means of dynamic time warping technique
dc.contributor.author | Milenin, Alexey P. | |
dc.contributor.author | Chan, B. T. | |
dc.contributor.author | Lazzarino, Frederic | |
dc.date.accessioned | 2023-04-03T04:00:13Z | |
dc.date.available | 2023-04-03T04:00:13Z | |
dc.date.issued | 2023-JUL 1 | |
dc.identifier.issn | 0021-4922 | |
dc.identifier.other | WOS:000949966400001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41418 | |
dc.source | WOS | |
dc.title | Assessment of STI dry etch process variability by means of dynamic time warping technique | |
dc.type | Journal article | |
dc.contributor.imecauthor | Milenin, Alexey P. | |
dc.contributor.imecauthor | Chan, B. T. | |
dc.contributor.imecauthor | Lazzarino, Frederic | |
dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
dc.identifier.doi | 10.35848/1347-4065/acbbd6 | |
dc.source.numberofpages | 5 | |
dc.source.peerreview | yes | |
dc.source.journal | JAPANESE JOURNAL OF APPLIED PHYSICS | |
dc.source.issue | SI | |
dc.source.volume | 62 | |
imec.availability | Under review |
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