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Assessment of STI dry etch process variability by means of dynamic time warping technique
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Authors
Milenin, Alexey
;
Chan, BT
;
Lazzarino, Frederic
DOI
10.35848/1347-4065/acbbd6
ISSN
0021-4922
Issue
SI
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume
62
Title
Assessment of STI dry etch process variability by means of dynamic time warping technique
Publication type
Journal article
Embargo date
9999-12-31
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2
20.500.12860/41418.2
*
2023-07-07T08:26:27Z
validation by library/open access desk
1
20.500.12860/41418
2023-04-03T04:00:13Z
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