dc.contributor.author | Pacco, Antoine | |
dc.contributor.author | Nakano, Teppei | |
dc.contributor.author | Iwahata, Shota | |
dc.contributor.author | Iwasaki, Akihisa | |
dc.contributor.author | Altamirano Sanchez, Efrain | |
dc.date.accessioned | 2023-07-04T07:56:57Z | |
dc.date.available | 2023-04-30T04:07:23Z | |
dc.date.available | 2023-07-04T07:56:57Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 0734-2101 | |
dc.identifier.other | WOS:000960627700001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41511.3 | |
dc.source | WOS | |
dc.title | Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution | |
dc.type | Journal article | |
dc.contributor.imecauthor | Pacco, Antoine | |
dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
dc.contributor.orcidimec | Pacco, Antoine::0000-0001-6330-5053 | |
dc.contributor.orcidimec | Altamirano Sanchez, Efrain::0000-0003-3235-6055 | |
dc.date.embargo | 9999-12-31 | |
dc.identifier.doi | 10.1116/6.0002404 | |
dc.source.numberofpages | 8 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 032601 | |
dc.source.endpage | na | |
dc.source.journal | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | |
dc.source.issue | 3 | |
dc.source.volume | 41 | |
imec.availability | Published - imec | |