Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution

Publication:

2023

Journal article

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JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A

2 since deposited on 2023-04-30

Acq. date: 2026-06-25

1252 since deposited on 2023-04-30

Acq. date: 2026-06-26