Publication:

Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution

Date

2023
Journal article
https://doi.org/10.1116/6.0002404
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dc.contributor.authorPacco, Antoine
dc.contributor.authorNakano, Teppei
dc.contributor.authorIwahata, Shota
dc.contributor.authorIwasaki, Akihisa
dc.contributor.authorAltamirano Sanchez, Efrain
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorAltamirano Sanchez, Efrain
dc.contributor.orcidimecPacco, Antoine::0000-0001-6330-5053
dc.contributor.orcidimecAltamirano Sanchez, Efrain::0000-0003-3235-6055
dc.date.accessioned2023-07-04T07:56:57Z
dc.date.available2023-04-30T04:07:23Z
dc.date.available2023-07-04T07:56:57Z
dc.date.embargo9999-12-31
dc.date.issued2023
dc.identifier.doi10.1116/6.0002404
dc.identifier.issn0734-2101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41511
dc.publisherA V S AMER INST PHYSICS
dc.source.beginpageArt. 032601
dc.source.endpagena
dc.source.issue3
dc.source.journalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
dc.source.numberofpages8
dc.source.volume41
dc.subject.keywordsCORROSION BEHAVIOR
dc.subject.keywordsMECHANISM
dc.subject.keywordsCOPPER
dc.subject.keywordsFILMS
dc.title

Etching of molybdenum via a combination of low-temperature ozone oxidation and wet-chemical oxide dissolution

dc.typeJournal article
dspace.entity.typePublication
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